Conflict detection for self-aligned multiple patterning compliance

ABSTRACT

Among other things, one or more techniques and systems for performing design layout are provided. An initial design layout is associated with an electrical component, such as a standard cell. A conflict graph is generated based upon the initial design layout. The conflict graph comprises one or more nodes, representing polygons within the initial design layout, connected by one or more edges. A same-process edge specifies that two nodes are to be generated by the same pattern process, while a different-process edge specified that two nodes are to be generated by different pattern processes, such as a mandrel pattern process and a passive fill pattern process. The conflict graph is evaluated to identify a conflict, such as a self-aligned multiple pattering (SAMP) conflict, associated with the initial design layout. The conflict is visually displayed so that the initial design layout can be modified to resolve the conflict.

BACKGROUND

Electronic design tools allow designers to layout, simulate, and analyzeelectrical components, such as standard cells and integrated circuits.In an example, a designer may create a design layout for a standardcell. Once the design layout is complete, complex post processing isused to make the design layout self-aligned multiple patterning (SAMP)compliant. For example, the design layout is adjusted using mandrelpattern and passive fill pattern. A trim mask is used to either retain aportion of the design layout covered by the trim mask to create a finallayout or to remove a portion of the design layout covered by the trimmask to create the final layout.

SUMMARY

This summary is provided to introduce a selection of concepts in asimplified form that are further described below in the detaileddescription. This summary is not intended to identify key factors oressential features of the claimed subject matter, nor is it intended tobe used to limit the scope of the claimed subject matter.

One or more techniques and systems for performing design layout areprovided herein. In some embodiments, the design layout corresponds toan electrical component, such as a standard cell configured to providelogic-based functionality or storage functionality. The electricalcomponent can be designed using at least one of a mandrel pattern or apassive fill pattern. Because the design layout can conflict withphysical space constraints associated with using mandrel pattern orpassive fill pattern, conflicts of the design layout can be identifiedand resolved for verification of the design layout as self-alignedmultiple patterning (SAMP) compliant as provided herein.

In some embodiments of detecting a conflict, an initial design layoutassociated with an electrical component is received. A conflict graph isgenerated from the initial design layout. The conflict graph comprisesone or more nodes connected by one or more edges. A node represents apolygon, corresponding to a portion of the electrical component, withinthe initial design layout. An edge corresponds to either a same-processedge type or a different-process edge type. The same-process edge typespecifies that two polygons represented by two nodes connected by asame-process edge are to be generated by the same patterning process.For example, a same-process edge connects a first node and a second nodethat are both to be generated by a first pattern process, such as eithera mandrel pattern process or a passive fill pattern process. Thedifferent-process edge type specifies that two polygons represented bytwo nodes connected by a different-process edge are to be generated bydifferent patterning processes. For example, a different-process edgeconnects a first node that is to be generated by the first patternprocess, such as the mandrel pattern process, and a second node that isto be generated by a second pattern process, such as the passive fillpattern process.

Responsive to the conflict graph comprising at least one same-processedge, a first cluster one node and a second cluster one node connectedby a first same-process edge are clustered into a first multi-nodecluster for inclusion within a cluster graph. In an example, a clusterone node is a node that can be included within the first multi-nodecluster based upon the cluster one node being connected to anothercluster one node by a same-process edge. For example, a third clusterone node that is connected by a same-process edge to at least one of thefirst cluster one node or the second cluster one node is clustered intothe first multi-node cluster for inclusion within the cluster graph. Inan example, one or more multi-node clusters are generated for inclusionwithin the cluster graph. For respective unclustered nodes, anunclustered node is included within the cluster graph as a single nodecluster. In this way, the cluster graph, comprising one or more nodeclusters, is generated. For respective loops within the cluster graph, aconflict associated with the initial design layout is identified basedupon a loop comprising an odd number of node clusters. As a simpleexample, the conflict can correspond to a first node connected to asecond node by both a same-process edge and a different-process edge. Asimilarity rule that the first node and the second node are to begenerated by the same pattern process, as specified by the same-processedge, and a difference rule that the first node and the second node areto be formed by different pattern processes, as specified by thedifferent-process edge, cannot both be satisfied. In an example, theconflict is displayed within a visualization of the initial designlayout. In another example, a spacing constraint recommendation, used toadjust spacing between one or more polygons within the initial designlayout in order to resolve the conflict, is displayed. In this way, theinitial design layout is modified, and a design layout that can beverified as self-aligned multiple patterning (SAMP) compliant isgenerated.

In some embodiments of detecting a conflict, an initial design layoutassociated with an electrical component is received. An initialrepresentation of the initial design layout is generated. The initialrepresentation comprises one or more nodes, representing polygons withinthe initial design layout that correspond to portions of the electricalcomponent, connected by one or more edges, such as a same-process edgeor a different-process edge. Responsive to the initial representationcomprising at least one same-process edge, one or more same-processedges are merged into the initial design layout to generate a mergeddesign layout. A conflict graph is generated based upon the mergeddesign layout. The conflict graph comprises one or more nodes connectedby one or more different-process edges. For respective loops within theconflict graph, a conflict associated with the initial design layout isidentified based upon a loop comprising an odd number of nodes. In thisway, the conflict is visually illustrated so that appropriate action canbe taken to resolve the conflict so that an SAMP compliant design layoutcan be generated.

The following description and annexed drawings set forth certainillustrative aspects and implementations. These are indicative of but afew of the various ways in which one or more aspects can be employed.Other aspects, advantages, and novel features of the disclosure willbecome apparent from the following detailed description when consideredin conjunction with the annexed drawings.

DESCRIPTION OF THE DRAWINGS

FIG. 1 is an illustration of one or more space threshold ranges,according to some embodiments.

FIG. 2 is a flow diagram illustrating an example method of performingdesign layout, according to some embodiments.

FIG. 3 is a flow diagram illustrating an example method of performingdesign layout, according to some embodiments.

FIG. 4 is an illustration of one or more conflict graphs and one or morecluster graphs, according to some embodiments.

FIG. 5 is a component block diagram illustrating an exemplary system forperforming design layout, according to some embodiments.

FIG. 6 is an illustration of an example computer-readable medium whereinprocessor-executable instructions configured to embody one or more ofthe provisions set forth herein may be comprised.

FIG. 7 illustrates an example computing environment wherein one or moreof the provisions set forth herein may be implemented.

DETAILED DESCRIPTION

The claimed subject matter is now described with reference to thedrawings, wherein like reference numerals are generally used to refer tolike elements throughout. In the following description, for purposes ofexplanation, numerous specific details are set forth in order to providean understanding of the claimed subject matter. It is evident, however,that the claimed subject matter can be practiced without these specificdetails. In other instances, structures and devices are illustrated inblock diagram form in order to facilitate describing the claimed subjectmatter.

FIG. 1 illustrates an example, according to some embodiments, of one ormore spacing threshold ranges. In an example, a first spacing thresholdrange 100 corresponds to a first spacing, such as a relatively smallspacing between a first polygon 102 and a second polygon 104. In anexample, the first polygon 102 and the second polygon 104 cannot bephysically manufactured using mandrel pattern or passive fill patternbased upon the first spacing. For example, a first mandrel pattern 106is formed as the first polygon 102. Spacer material 108 is formed aroundthe first mandrel pattern 106. Neither a second mandrel pattern nor apassive fill pattern, such as a passive fill pattern 110, can bephysically formed as the second polygon 104 at the first spacing fromthe first polygon 102.

In an example, a second spacing threshold range 120 corresponds to asecond spacing between the first polygon 102 and the second polygon 104.For example, the second spacing is relatively larger than the firstspacing corresponding to the first spacing threshold range 100. Thefirst polygon 102 is represented by a first mandrel pattern 122surrounded by a first spacer material 124. The second polygon 104 isrepresented by a passive fill pattern 126 formed between the firstspacer material 124 of the first mandrel pattern 122 and a second spacermaterial 130 of a second mandrel pattern 128, such as a dummy mandrelpattern used merely to form the passive fill pattern 126. In this way,the first polygon 102 and the second polygon 104 can be formed at thesecond spacing based upon a different-process pattern rule specifyingthat the first polygon 102 and the second polygon 104 are to be formedfrom different pattern processes, such as mandrel pattern for the firstpolygon 102 and the passive fill pattern for the second polygon 104.

In an example, a third spacing threshold range 140 corresponds to athird spacing between the first polygon 102 and the second polygon 104.For example, the third spacing is relatively larger than the secondspacing corresponding to the second spacing threshold range 120. In anexample, the first polygon 102 and the second polygon 104 cannot bephysically manufactured using mandrel pattern or passive fill patternbased upon the third spacing. For example, a first mandrel pattern 142is formed as the first polygon 102. Spacer material 144 is formed aroundthe first mandrel pattern 142. Neither a second mandrel pattern nor apassive fill pattern, such as a passive fill pattern 146, can bephysically formed as the second polygon 104 at the third spacing fromthe first polygon 102.

In an example, a fourth spacing threshold range 150 corresponds to afourth spacing between the first polygon 102 and the second polygon 104.For example, the fourth spacing is relatively larger than the thirdspacing corresponding to the third spacing threshold range 140. Basedupon the fourth spacing, the first polygon 102 and the second polygon104 can be formed based upon a same-process pattern rule specifying thatthe first polygon 102 and the second polygon 104 are to be formed fromthe same pattern process. In an example, the first polygon 102 isrepresented by a first mandrel pattern 152 surrounded by a first spacermaterial 154, and the second polygon 104 is represented by a secondmandrel pattern 156 surrounded by a second spacer material 158. Inanother example, the first polygon 102 is represented by a first passivefill pattern 164 formed relative to a third spacer material 162surrounding a third mandrel pattern 160, such as a dummy mandrelpattern, and the second polygon 104 is represented by a second passivefill pattern 166 formed relative to the third spacer material 162surrounding the third mandrel pattern 160.

In an example, a fifth spacing threshold range 170 corresponds to afifth spacing between the first polygon 102 and the second polygon 104.For example, the fifth spacing is relatively larger than the fourthspacing corresponding to the fourth spacing threshold range 150. Basedupon the fifth spacing, the first polygon 102 and the second polygon 104can be formed based upon the same-process pattern rule or thedifferent-process pattern rule. In an example of the same-processpattern rule, the first polygon 102 is represented by a first passivefill pattern 194 formed relative to a first spacer material 199surrounding a first mandrel pattern 196, such as a dummy mandrelpattern, and the second polygon 104 is represented by a second fillpattern 198 formed relative to the third spacer material 199 surroundingthe third mandrel pattern 196. In another example of the same-processpattern rule, the first polygon 102 is represented by a second mandrelpattern 190 surrounded by a second spacer material 186, and the secondpolygon 104 is represented by a third mandrel pattern 192 surrounded bya third spacer material 188. In an example of the different-processpattern rule, the first polygon 102 is represented by a fourth mandrelpattern 172 surrounded by a fourth spacer material 174, and the secondpolygon 104 is represented by a third passive fill pattern 182 formedbetween a fifth spacer material 178 surrounding a fifth mandrel pattern176, such as a dummy mandrel pattern, and a sixth spacer material 184surrounding a fifth mandrel pattern 180, such as a dummy mandrelpattern. In this way, one or more polygons within a design layout of anelectrical component can be generated based upon such process patterndesign rules, which can mitigate self-aligned multiple patterning (SAMP)conflicts.

An exemplary method 200 of performing design layout, according to someembodiments, is illustrated in FIG. 2, and exemplary design layoutsevaluated by such a methodology are illustrated in FIG. 4. At 202, aninitial design layout associated with an electrical component, such as astandard cell, is received. The initial design layout comprises one ormore polygons that are to be formed to create the electrical component.It is appreciated that four different examples, such as an example 410,an example 420, an example 440, and an example 460, are described inconjunction with exemplary method 200 for illustrative purposes to showinitial design layouts having either conflicts or no conflicts. In theexample 410 of FIG. 4, a first initial design layout comprises a firstpolygon 402, a second polygon 404, and a third polygon 406. In theexample 420 of FIG. 4, a second initial design layout comprises a firstpolygon 422, a second polygon 424, and a third polygon 426. In theexample 440 of FIG. 4, a third initial design layout comprises a firstpolygon 444, a second polygon 446, a third polygon 448, and a fourthpolygon 442. In the example 460, a fourth initial design layoutcomprises a first polygon 462, a second polygon 464, and a third polygon468. As provided herein, conflict detection and correction isfacilitated so that a design layout that is self-aligned multiplepatterning (SAMP) compliant can be generated from the initial designlayout.

At 204, a conflict graph is generated from the initial design layout.The conflict graph comprises one or more nodes connected by one or moreedges. A node represents a polygon within the initial design layout. Anedge specifies whether two nodes connected by the edge are to be formedfrom the same pattern process or formed by different pattern processes.In an example, a same-process edge, connecting a first node and a secondnode, specifies that the first node and the second node are to both begenerated by a first pattern process, such as a mandrel pattern process.In an example, a different-process edge, connecting a third node and afourth node, specifies that the third node is to be formed by the firstpattern process, such as the mandrel pattern process, and that thefourth node is to be formed by a second pattern process, such as apassive fill pattern process.

In example 410 of FIG. 4, a first conflict graph 490 is generated fromthe first initial design layout. The first conflict graph 490 comprisesa first node 403 representing the first polygon 402, a second node 405representing the second polygon 404, and a third node 407 representingthe third polygon 406. A first different-process edge 412 connects thefirst node 403 and the second node 405 based upon spacing between thefirst node 403 and the second node 405 corresponding to a spacingthreshold range specifying that the first node 403 and the second node405 are to be formed by different pattern processes. A seconddifferent-process edge 414 connects the second node 405 and the thirdnode 407 based upon spacing between the second node 405 and the thirdnode 407 corresponding to a spacing threshold range specifying that thesecond node 405 and the third node 407 are to be formed by the differentpattern processes. A first same-process edge 408 connects the first node403 and the third node 407 based upon spacing between the first node 403and the third node 407 corresponding to a spacing threshold rangespecifying that the first node 403 and the third node 407 are to beformed by the same pattern process. A second same-process edge 410connects the first node 403 and the third node 407 based upon spacingbetween the first node 403 and the third node 407 corresponding to aspacing threshold range specifying that the first node 403 and the thirdnode 407 are to be formed by the same pattern process. In this way, thefirst conflict graph 490 is generated from the first initial designlayout in example 410.

In example 420 of FIG. 4, a second conflict graph 492 is generated fromthe second initial design layout. The second conflict graph 492comprises a first node 423 representing the first polygon 422, a secondnode 425 representing the second polygon 424, and a third node 427representing the third polygon 426. The second conflict graph 492comprises one or more edges that specify whether polygon pairings, suchas two polygons represented by two nodes connected by an edge, are to beformed by the same or different pattern processes based upon spacingbetween such polygons. A first different-process edge 432 connects thefirst node 423 and the second node 425. A second different-process edge434 connects the second node 425 and the third node 427. A thirddifferent-process edge 428 connects the first node 423 and the thirdnode 427. A first same-process edge 430 connects the first node 423 andthe third node 427. In this way, the second conflict graph 492 isgenerated from the second initial design layout in example 420.

In example 440 of FIG. 4, a third conflict graph 494 is generated fromthe third initial design layout. The third conflict graph 494 comprisesa first node 443 representing the first polygon 444, a second node 445representing the second polygon 446, a third node 447 representing thethird polygon 448, and a fourth node 449 representing the fourth polygon442. The third conflict graph 494 comprises one or more edges thatspecify whether polygon pairings, such as two polygons represented bytwo nodes connected by an edge, are to be formed by the same ordifferent pattern processes based upon spacing between such polygons. Afirst different-process edge 452 connects the first node 443 and thesecond node 445. A first same-process edge 454 connects the second node445 and the third node 447. A second same-process edge 456 connects thethird node 447 and the fourth node 449. A third same-process edge 458connects the fourth node 449 and the first node 443. In this way, thethird conflict graph 492 is generated from the third initial designlayout in example 440.

In example 460 of FIG. 4, a fourth conflict graph 496 is generated fromthe fourth initial design layout. The fourth conflict graph 496comprises a first node 463 representing the first polygon 462, a secondnode 465 representing the second polygon 464, and a third node 469representing the third polygon 468. The fourth conflict graph 496comprises one or more edges that specify whether polygon pairings, suchas two polygons represented by two nodes connected by an edge, are to beformed by the same or different pattern processes based upon spacingbetween such polygons. A first different-process edge 470 connects thesecond node 465 and the third node 469. A second different-process edge472 connects the third node 469 and the first node 463. A thirddifferent-process edge 474 connects the first node 463 and the secondnode 465. In this way, the fourth conflict graph 496 is generated fromthe fourth initial design layout in example 460.

At 206, responsive to a conflict graph comprising at least onesame-process edge, a first cluster one node and a second cluster onenode connected by a first same-process edge are clustered into a firstmulti-node cluster for inclusion within a cluster graph. In an example,a cluster one node is a node that is connected to one or more othercluster one nodes by same-process edges, such that the cluster one nodesare identified for inclusion within the first multi-node cluster. Amulti-node cluster can comprise two or more nodes, such as a thirdcluster one node connected to at least one of the first cluster one nodeor the second cluster one node by a same-process edge. In anotherexample, a cluster two node is a node that is connected to one or moreother cluster two nodes, but not a cluster one node, by same-processedges, such that the cluster two nodes are identified for inclusionwithin a second multi-node cluster. In this way, one or more multi-nodeclusters are generated based upon nodes interconnected by same-processedges. At 208, for respective unclustered nodes, an unclustered node isincluded as a single node cluster within the cluster graph. A singlenode cluster comprises a single node. At 210, for respective loopswithin the clustered graph, a conflict associated with the initialdesign layout is identified based upon a loop comprising an odd numberof node clusters.

In example 410 of FIG. 4, a first cluster graph 491 is generated basedupon one or more clusters identified from the first conflict graph 490.For example, the first node 403 and the third node 407 are clusteredinto a first multi-node cluster 416 based upon the first node 403 andthe third node 407 being connected by at least one same-process edge,such as the first same-process edge 408 or the second same-process edge410. The second node 405 is clustered into a first single node cluster418. In this way, the first conflict graph 490 comprises a single loopcorresponding to the first multi-node cluster 416 connected to the firstsingle node cluster 418 by the first different-process edge 412 and thesecond different-process edge 414. Because the single loop comprises aneven number of node clusters, the first multi-node cluster 416 and thefirst single node cluster 418, no conflicts are detected for the firstinitial design layout.

In example 420 of FIG. 4, a second cluster graph 493 is generated basedupon one or more clusters identified from the second conflict graph 492.For example, the first node 423 and the third node 427 are clusteredinto a first multi-node cluster 436 based upon the first node 423 andthe third node 427 being connected by the first same-process edge 430.The second node 425 is clustered into a first single node cluster 438.In this way, the second conflict graph 493 comprises a first loop and asecond loop. The first loop corresponds to the first multi-node cluster436 connected to itself by the third different-process edge 428, and thesecond loop corresponds to the first multi-node cluster 436 connected tothe first single node cluster 438 by the first different-process edge432 and the second different process edge 434. Because the first loopcomprises an odd number of node clusters, the first multi-node cluster436, a conflict is detected for the second initial design layout. In anexample, the conflict is displayed within a visualization of the secondinitial design layout. In an example, a spacing constraintrecommendation for the conflict is provided. In an example, the spacingconstraint recommendation provides a suggested spacing between one ormore polygons, which can result in removal of an edge or modification ofan edge type. For example, the spacing constraint recommendationspecifies an increase in spacing between the first polygon 422 and alower portion of the second polygon 426. The increase spacing can resultin the third different-process edge 428 changing to a same-process edgetype because the increased spacing can correspond to a spacing thresholdrange specifying a same-process edge type. In an example of displayingthe conflict, one or more mandrel pattern layers for the second initialdesign layout are displayed. A mandrel pattern comprises at least one ofa mandrel or dummy mandrel surrounded at least in part by spacer. One ormore trim pattern layers are displayed. In this way, a designer of thesecond initial design layout can visualize the conflict and modify thesecond initial design layout accordingly. In an example, responsive to amodification of the second initial design layout to resolve theconflict, a design layout, which can be verified as self-alignedmultiple patterning (SAMP) compliant, can be generated based at least inpart upon the modified second initial design layout.

In example 440 of FIG. 4, a third cluster graph 495 is generated basedupon one or more clusters identified from the third conflict graph 494.For example, a first node 443, a second node 445, a third node 447, anda fourth node 449 are clustered into a first multi-node cluster 450based upon such nodes being connected by same-process edges, such as thefirst same-process edge 454, the second same-process edge 456, and thethird same-process edge 458. In this way, the third conflict graph 495comprises a single loop corresponding to the first multi-node cluster450 being connected to itself by the first different-process edge 452.Because the single loop comprises an odd number of node clusters, thefirst multi-node cluster 450, a conflict is detected for the thirdinitial design layout. The conflict can be illustrated within avisualization of the third initial design layout, and a spacingconstraint recommendation can be provided for the conflict. Responsiveto a modification of the third initial design layout to resolve theconflict, a design layout, which can be verified as self-alignedmultiple patterning compliant, can be generated based at least in partupon the modified third initial design layout.

In example 460 of FIG. 4, a fourth cluster graph 497 is generated basedupon one or more clusters identified from the fourth conflict graph 496.For example, a first node 463 is clustered into a first single nodecluster 476. A second node 465 is clustered into a second single nodecluster 480. A third node 469 is clustered into a third single nodecluster 478. In this way, the fourth cluster graph 497 comprises asingle loop corresponding to the first single node cluster 476 beingconnected to the second single node cluster 480 by the thirddifferent-process edge 474, the second single node cluster 480 beingconnected to the third single node cluster 478 by the firstdifferent-process edge 470, and the third single node cluster 478 beingconnected to the first single node cluster 476 by the seconddifferent-process edge 472. Because the single loop comprises an oddnumber of node clusters, the single node cluster 476, the second singlenode cluster 480, and the third single node cluster 478, a conflict isdetected for the fourth initial design layout. The conflict can beillustrated within a visualization of the fourth initial design layout,and a spacing constraint recommendation can be provided for theconflict. Responsive to a modification of the fourth initial designlayout to resolve the conflict, a design layout, which can be verifiedas self-aligned multiple patterning compliant, can be generated based atleast in part upon the modified fourth initial design layout.

An exemplary method 300 of performing design layout, according to someembodiments, is illustrated in FIG. 3. At 302, an initial design layoutassociated with an electrical component is received. At 304, an initialrepresentation of the initial design layout is generated. The initialrepresentation comprises one or more nodes connected by one or moreedges. A node represents a polygon in the initial design layout. Anedge, connecting two nodes, specifies whether the two nodes are to beformed by the same pattern process or by different pattern processesbased upon spacing, between polygons represented by the two nodes,corresponding to a particular spacing threshold range. In an example, asame-process edge connects a first node that is to be generated by afirst pattern process, such as a mandrel pattern process, and a secondnode that is to be formed by the first pattern process. In anotherexample, a different-process edge connects a third node that is to begenerated by the first pattern process, such as the mandrel patternprocess, and a fourth node that is to be formed by a second patternprocess, such as a passive fill pattern process.

At 306, responsive to the initial representation comprising at least onesame-process edge, one or more same-process edges are merged into theinitial design layout to generate a merged design layout. At 308, aconflict graph is generated based upon the merged design layout. Theconflict graph comprises one or more nodes connected by one or moredifferent-process edges. In an example, the conflict graph does notcomprise a same-process edge because the one or more same-process edgeswere merged into the initial design layout. At 310, for respective loopswithin the conflict graph, a conflict associated with the initial designlayout is identified based upon the loop comprising an odd number ofnodes. In this way, the conflict is identified and presented. Responsiveto modification of the initial design layout to resolve the conflict, adesign layout is generated based upon the modified initial designlayout. The design layout can be verified, baring no other conflicts, asself-alignment multiple pattern (SAMP) compliant before at least one ofgeneration of one or more mandrel pattern layers or generation of one ormore trim pattern layers. Once verified, one or more mandrel patternlayers for the design layout are generated. A mandrel pattern layercomprises mandrel surrounded at least in part by spacer. One or moretrim pattern layers are generated for the design layout, such that aportion of the design layout covered by a trim pattern layer is eitherremoved or retained based upon a trimming technique used, such as anegative or a positive trim technique.

FIG. 5 illustrates an example, according to some embodiments, of asystem 500 for performing design layout. The system 500 comprises agraph component 504, a conflict detection component 506, and aconfliction resolution component 508. The graph component 504 isconfigured to receive an initial design layout 502 associated with anelectrical component, such as a standard cell. The graph component 504is configured to generate a conflict graph, such as conflict graphs 490,492, 494, 496 of FIG. 4. The conflict graph comprises one or more nodesconnected by one or more edges. For example, an edge, between a firstnode and a second node, comprises an edge type that is identified basedupon a space, between a first polygon represented by the first node anda second polygon represented by the second node, corresponding to aspacing threshold range assigned to the edge type. In an example, theedge type comprises a same-process edge type indicating that two nodesconnected by a same-process edge are to be generated by the same patternprocess. In another example, the edge type comprises a different-processedge type indicating that two nodes connected by a different-processedge are to be generated by different patterning processes. In anexample. the graph component 504 is configured to cluster one or morenodes within the cluster graph. For example, responsive to the conflictgraph comprising at least one same-process edge, the graph component 504is configured to cluster a first cluster one node and a second clusterone node connected by a first same-process edge into a first multi-nodecluster for inclusion within the conflict graph, such as a clustergraph. For respective unclustered nodes, the graph component 504 isconfigured to include an unclustered node as a single node clusterwithin the cluster graph.

The conflict detection component 506 is configured to identify aconflict within the initial design layout 502, such as a self-alignedmultiple pattern (SAMP) conflict, using the conflict graph or thecluster graph. For example, for respective loops within the conflictgraph, a conflict associated with the initial design layout 502 isdetected based upon the loop comprising an odd number of nodes. Theconflict detection component 506 is configured to provide 510 at leastone of the conflict or a spacing constraint recommendation that can beused to resolve the conflict. The conflict resolution component 508 isconfigured to receive a modification 512 to the initial design layout502, resulting in a modified initial design layout. The conflictresolution component 508 is configured to generate a design layout, suchas an SAMP compliant design layout, based upon the modified initialdesign layout. The conflict resolution component 508 is configured togenerate 514 at least one of one or more mandrel pattern layers for thedesign layout or one or more trim pattern layouts for the design layout.In this way, one or more polygons within the design layout are formed byat least one of mandrel pattern or passive fill pattern.

According to an aspect of the instant disclosure, a method forperforming design layout is provided. The method comprises, receiving aninitial design layout associated with an electrical component. Aconflict graph is generated from the initial design layout. The conflictgraph comprises one or more nodes connected by one or more edges. A noderepresents a polygon within the initial design layout. An edge comprisesat least one of a same-process edge or a different-process edge. In anexample, a same-process edge, connecting a first node and a second node,specifies that the first node and the second node are to be generated bya first pattern process, such as a mandrel pattern process. In anotherexample, a different-process edge, connecting a third node and a fourthnode, specifies that the third node is to be generated by the firstpattern process and that the fourth node is to be generated by a secondpattern process, such as a fill pattern process. In some embodiments,responsive to the conflict graph comprising at least one same-processedge, a first cluster one node and a second cluster one node connectedby a first same-process edge are clustered into a first multi-nodecluster for inclusion within a cluster graph. For respective unclusterednodes, an unclustered node is included as a single node cluster withinthe cluster graph. For respective loops within the cluster graph, aconflict associated with the initial design layout is identified basedupon a loop comprising an odd number of node clusters.

According to an aspect of the instant disclosure, a method forperforming design layout is provided. The method comprises, receiving aninitial design layout associated with an electrical component. Aninitial representation of the initial design layout is generated fromthe initial design layout. The initial representation graph comprisesone or more nodes connected by one or more edges. A node represents apolygon within the initial design layout. An edge comprises at least oneof a same-process edge or a different-process edge. In an example, asame-process edge, connecting a first node and a second node, specifiesthat the first node and the second node are to be generated by a firstpattern process, such as a mandrel pattern process. In another example,a different-process edge, connecting a third node and a fourth node,specifies that the third node is to be generated by the first patternprocess and that the fourth node is to be generated by a second patternprocess, such as a fill pattern process. In some embodiments, responsiveto the initial representation comprising at least one same-process edge,merging one or more same-process edges into the initial design layout togenerate a merged design layout. A conflict graph is generated basedupon the merged design layout. The conflict graph comprises one or morenodes connected by one or more different-process edges. For respectiveloops within the conflict graph, a conflict associated with the initialdesign layout is identified based upon a loop comprising an odd numberof nodes.

According to an aspect of the instant disclosure, a system forperforming design layout is provided. The system comprises a graphcomponent and a conflict detection component. The graph component isconfigured to receive an initial design layout associated with anelectrical component. The graph component is configured to generate aconflict graph from the initial design layout. The conflict graphcomprises one or more nodes connected by one or more edges. A noderepresents a polygon within the initial design layout. An edge, betweena first node and a second node, comprises an edge type, such as asame-process edge type or a different-process edge type, identifiedbased upon a space, between a first polygon represented by the firstnode and a second polygon represented by the second node, correspondingto a spacing threshold range assigned to the edge type. The conflictdetection component is configured to identify a conflict associated withthe initial design layout based upon a loop within the conflict graphcomprising an odd number of nodes.

Still another embodiment involves a computer-readable medium comprisingprocessor-executable instructions configured to implement one or more ofthe techniques presented herein. An exemplary computer-readable mediumthat may be devised in these ways is illustrated in FIG. 6, wherein theimplementation 600 comprises a computer-readable medium 616 (e.g., aCD-R, DVD-R, flash drive, a platter of a hard disk drive, etc.), onwhich is encoded computer-readable data 614. This computer-readable data614 in turn comprises a set of computer instructions 612 configured tooperate according to one or more of the principles set forth herein. Inone such embodiment 600, the processor-executable computer instructions612 may be configured to perform a method 610, such as at least some ofthe exemplary method 200 of FIG. 2 and/or at least some of the exemplarymethod 300 of FIG. 3, for example. In another such embodiment, theprocessor-executable instructions 612 may be configured to implement asystem, such as at least some of the exemplary system 500 of FIG. 5, forexample. Many such computer-readable media may be devised by those ofordinary skill in the art that are configured to operate in accordancewith the techniques presented herein.

Although the subject matter has been described in language specific tostructural features and/or methodological acts, it is to be understoodthat the subject matter defined in the appended claims is notnecessarily limited to the specific features or acts described above.Rather, the specific features and acts described above are disclosed asexample forms of implementing the claims.

As used in this application, the terms “component,” “module,” “system”,“interface”, and the like are generally intended to refer to acomputer-related entity, either hardware, a combination of hardware andsoftware, software, or software in execution. For example, a componentmay be, but is not limited to being, a process running on a processor, aprocessor, an object, an executable, a thread of execution, a program,and/or a computer. By way of illustration, both an application runningon a controller and the controller can be a component. One or morecomponents may reside within a process and/or thread of execution and acomponent may be localized on one computer and/or distributed betweentwo or more computers.

Furthermore, the claimed subject matter may be implemented as a method,apparatus, or article of manufacture using standard programming and/orengineering techniques to produce software, firmware, hardware, or anycombination thereof to control a computer to implement the disclosedsubject matter. The term “article of manufacture” as used herein isintended to encompass a computer program accessible from anycomputer-readable device, carrier, or media. Of course, those skilled inthe art will recognize many modifications may be made to thisconfiguration without departing from the scope or spirit of the claimedsubject matter.

FIG. 7 and the following discussion provide a brief, general descriptionof a suitable computing environment to implement embodiments of one ormore of the provisions set forth herein. The operating environment ofFIG. 7 is only one example of a suitable operating environment and isnot intended to suggest any limitation as to the scope of use orfunctionality of the operating environment. Example computing devicesinclude, but are not limited to, personal computers, server computers,hand-held or laptop devices, mobile devices (such as mobile phones,Personal Digital Assistants (PDAs), media players, and the like),multiprocessor systems, consumer electronics, mini computers, mainframecomputers, distributed computing environments that include any of theabove systems or devices, and the like.

Although not required, embodiments are described in the general contextof “computer readable instructions” being executed by one or morecomputing devices. Computer readable instructions may be distributed viacomputer readable media (discussed below). Computer readableinstructions may be implemented as program modules, such as functions,objects, Application Programming Interfaces (APIs), data structures, andthe like, that perform particular tasks or implement particular abstractdata types. Typically, the functionality of the computer readableinstructions may be combined or distributed as desired in variousenvironments.

FIG. 7 illustrates an example of a system 710 comprising a computingdevice 712 configured to implement one or more embodiments providedherein. In one configuration, computing device 712 includes at least oneprocessing unit 716 and memory 718. Depending on the exact configurationand type of computing device, memory 718 may be volatile (such as RAM,for example), non-volatile (such as ROM, flash memory, etc., forexample) or some combination of the two. This configuration isillustrated in FIG. 7 by dashed line 714.

In other embodiments, device 712 may include additional features and/orfunctionality. For example, device 712 may also include additionalstorage (e.g., removable and/or non-removable) including, but notlimited to, magnetic storage, optical storage, and the like. Suchadditional storage is illustrated in FIG. 7 by storage 720. In someembodiments, computer readable instructions to implement one or moreembodiments provided herein may be in storage 720. Storage 720 may alsostore other computer readable instructions to implement an operatingsystem, an application program, and the like. Computer readableinstructions may be loaded in memory 718 for execution by processingunit 716, for example.

The term “computer readable media” as used herein includes computerstorage media. Computer storage media includes volatile and nonvolatile,removable and non-removable media implemented in any method ortechnology for storage of information such as computer readableinstructions or other data. Memory 718 and storage 720 are examples ofcomputer storage media. Computer storage media includes, but is notlimited to, RAM, ROM, EEPROM, flash memory or other memory technology,CD-ROM, Digital Versatile Disks (DVDs) or other optical storage,magnetic cassettes, magnetic tape, magnetic disk storage or othermagnetic storage devices, or any other medium which can be used to storethe desired information and which can be accessed by device 712. Anysuch computer storage media may be part of device 712.

The term “computer readable media” may include communication media.Communication media typically embodies computer readable instructions orother data in a “modulated data signal” such as a carrier wave or othertransport mechanism and includes any information delivery media. Theterm “modulated data signal” may include a signal that has one or moreof its characteristics set or changed in such a manner as to encodeinformation in the signal.

Device 712 may include input device(s) 724 such as keyboard, mouse, pen,voice input device, touch input device, infrared cameras, video inputdevices, and/or any other input device. Output device(s) 722 such as oneor more displays, speakers, printers, and/or any other output device mayalso be included in device 712. Input device(s) 724 and output device(s)722 may be connected to device 712 via a wired connection, wirelessconnection, or any combination thereof. In some embodiments, an inputdevice or an output device from another computing device may be used asinput device(s) 724 or output device(s) 722 for computing device 712.Device 712 may also include communication connection(s) 726 tofacilitate communications with one or more other devices.

Various operations of embodiments are provided herein. The order inwhich some or all of the operations are described should not beconstrued as to imply that these operations are necessarily orderdependent. Alternative ordering will be appreciated by one skilled inthe art having the benefit of this description. Further, it will beunderstood that not all operations are necessarily present in eachembodiment provided herein.

Moreover, “exemplary” is used herein to mean serving as an example,instance, illustration, etc., and not necessarily as advantageous. Asused in this application, “or” is intended to mean an inclusive “or”rather than an exclusive “or”. In addition, “a” and “an” as used in thisapplication are generally to be construed to mean “one or more” unlessspecified otherwise or clear from context to be directed to a singularform. Also, at least one of A and B or the like generally means A or Bor both A and B. Furthermore, to the extent that “includes”, “having”,“has”, “with”, or variants thereof are used in either the detaileddescription or the claims, such terms are intended to be inclusive in amanner similar to “comprising”.

Also, although the disclosure has been shown and described with respectto one or more implementations, equivalent alterations and modificationswill occur to others skilled in the art based upon a reading andunderstanding of this specification and the annexed drawings. Thedisclosure includes all such modifications and alterations and islimited only by the scope of the following claims.

What is claimed is:
 1. A method for performing design layout,comprising: receiving an initial design layout associated with anelectrical component; generating a conflict graph from the initialdesign layout, the conflict graph comprising one or more nodes connectedby one or more edges, a node representing a polygon within the initialdesign layout, an edge comprising at least one of: a same-process edgeconnecting a first node generated by a first pattern process and asecond node generated by the first pattern process, or adifferent-process edge connecting a third node generated by the firstpattern process and a fourth node generated by a second pattern process;generating a cluster graph responsive to the conflict graph comprisingthe same-process edge, the cluster graph comprising a first node clusterrepresenting the first node and the second node; and identifying aconflict associated with the initial design layout based upon thecluster graph, at least some of the method implemented at least in partvia a processing unit.
 2. The method of claim 1, the first node clusterrepresenting the third node when at least one of the first node or thesecond node is connected to the third node by a second same-processedge.
 3. The method of claim 1, the identifying a conflict comprising:identifying the conflict associated with the initial design layout basedupon a loop within the cluster graph comprising an odd number of nodeclusters.
 4. The method of claim 1, comprising: displaying the conflictwithin a visualization of the initial design layout.
 5. The method ofclaim 4, comprising at least one of: providing a spacing constraintrecommendation for the conflict; or applying the spacing constraintrecommendation, resulting in removal of the different-process edge. 6.The method of claim 4, the displaying the conflict comprising:displaying one or more mandrel pattern layers for the initial designlayout, a mandrel pattern layer comprising mandrel surrounded at leastin part by spacer; and displaying one or more trim pattern layers forthe initial design layout.
 7. The method of claim 1, comprising:modifying the initial design layout to resolve the conflict and generatea modified initial design layout.
 8. The method of claim 7, comprising:verifying that the modified initial design layout is self-alignedmultiple patterning compliant.
 9. The method of claim 7, comprisingapplying a trim mask to the modified initial design layout.
 10. Themethod of claim 7, the modifying the initial design layout comprising:applying at least one of a min space rule, an island rule, an isolatedtrench rule, a corner-to-corner rule, or a flip assignment rule to theinitial design layout.
 11. The method of claim 1, the generating aconflict graph comprising: connecting the third node to the fourth nodeusing the different-process edge based upon a space between a thirdpolygon, represented by the third node, and a fourth polygon,represented by the fourth node, corresponding to a first spacingthreshold range.
 12. The method of claim 1, the generating a conflictgraph comprising: connecting the first node to the second node using thesame-process edge based upon a space between a first polygon,represented by the first node, and a second polygon, represented by thesecond node, corresponding to a second spacing threshold range.
 13. Asystem for performing design layout, comprising: a graph componentconfigured to: receive an initial design layout associated with anelectrical component; and generate a conflict graph from the initialdesign layout, the conflict graph comprising one or more nodes connectedby one or more edges, a node representing a polygon within the initialdesign layout, an edge comprising at least one of: a same-process edgeconnecting a first node generated by a first pattern process and asecond node generated by the first pattern process, or adifferent-process edge connecting a third node generated by the firstpattern process and a fourth node generated by a second pattern process;and a conflict detection component configured to: generate a clustergraph responsive to the conflict graph comprising the same-process edge,the cluster graph comprising a first node cluster representing the firstnode and the second node; and identify a conflict associated with theinitial design layout based upon the cluster graph.
 14. The system ofclaim 13, the first node cluster representing the third node but not thefourth node.
 15. The system of claim 13, the conflict detectioncomponent configured to: identify the conflict associated with theinitial design layout based upon a loop within the cluster graphcomprising an odd number of node clusters.
 16. The system of claim 13,the conflict detection component configured to: display the conflictwithin a visualization of the initial design layout.
 17. The system ofclaim 16, the conflict detection component configured to: provide aspacing constraint recommendation for the conflict; or apply the spacingconstraint recommendation, resulting in removal of the different-processedge.
 18. The system of claim 16, the conflict detection componentconfigured to: display one or more mandrel pattern layers for theinitial design layout, a mandrel pattern layer comprising mandrelsurrounded at least in part by spacer; and display one or more trimpattern layers for the initial design layout.
 19. The system of claim13, comprising: a conflict resolution component configured to: modifythe initial design layout to resolve the conflict and generate amodified initial design layout.
 20. A non-transitory computer readablemedium comprising instructions which when executed perform a method forperforming design layout, comprising: receiving an initial design layoutassociated with an electrical component; generating a conflict graphfrom the initial design layout, the conflict graph comprising one ormore nodes connected by one or more edges, a node representing a polygonwithin the initial design layout, an edge comprising at least one of: asame-process edge connecting a first node generated by a first patternprocess and a second node generated by the first pattern process, or adifferent-process edge connecting a third node generated by the firstpattern process and a fourth node generated by a second pattern process;generating a cluster graph responsive to the conflict graph comprisingthe same-process edge, the cluster graph comprising a first node clusterrepresenting the first node and the second node; and identifying aconflict associated with the initial design layout based upon thecluster graph.